• Tailored crystallinity and defect engineering in ultrathin solid-state electrolytes enable enhanced nanoscale ion transport.
• Chemically stable and conformal interfaces mitigate interfacial failure and space charge effects in microbattery architectures.
• Spatial atomic layer deposition and scalable vapor-phase strategies enable 3D integration and monolithic interfacing of thin-film microbatteries with internet of things device platforms.
• Vapor deposition techniques are pivotal for fabricating high-performance thin-film microbatteries, addressing challenges in materials innovation, interface optimization, and scalable manufacturing.