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Shadow-Assisted Sidewall Emission for Achieving Submicron Linewidth Light Source by Using Normal UV Photolithography

Authors: Junlong Li; Yanmin Guo; Kun Wang; Wei Huang; Hao Su; Wenhao Li; Xiongtu Zhou; Yongai Zhang; Tailiang Guo; Chaoxing Wu

DOI: 10.1007/s40820-025-01737-wStatus: Verified Translated Edition
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Key Findings in This Report

• Submicron light sources are realized using only standard UV photolithography, enabling arbitrary patterns without complex nanofabrication. • A novel shadow-assisted sidewall emission (SASE) technique precisely controls polymer sidewall emission via metal shadow modulation. • Red, green, and blue submicron light sources are successfully demonstrated, with linewidth tunable by exposure dose, development time, and metal thickness. • The SASE-based light sources show strong scalability and are proven applicable in optical anti-counterfeiting, offering a cost-effective route for high-resolution micro-optics.