Research Progress of Microstructure Regulation on the Electrical Properties of PZT Ferroelectric Films

• Microstructural parameters such as thickness, porosity, Zr/Ti ratio, doping, grain size, grain boundaries, and orientation critically influence the dielectric, ferroelectric, and piezoelectric properties of PZT ferroelectric films. • Geometric structure (thickness and porosity) directly impacts electrical performance, with application-specific requirements dictating optimal dimensions and porosity. • Compositional adjustments (Zr/Ti ratio and doping) alter phase composition, thereby tuning ferroelectric and piezoelectric responses. • Grain structure (size, boundaries, orientation) affects domain dynamics and switching behavior, offering pathways for performance optimization in device design.