• Photolithography offers unparalleled resolution and design flexibility, making it ideal for fabricating microbatteries with precise micropatterns and complex 3D architectures.
• The technique serves multiple roles in MB fabrication: as a template for 2D/3D micropatterns, a protective layer during etching, a mold for soft lithography, a component of active materials, and a sacrificial layer for micro-Swiss-roll structures.
• Challenges remain in materials selection, packaging, and performance evaluation, but photolithographic MBs hold promise for powering IoT devices with on-chip energy storage.
• This review provides a comprehensive framework for understanding photolithographic microfabrication, guiding future research and development in miniaturized energy storage.