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Open AccessDOI: 10.1007/s40820-025-01724-1Original Research

Integrating Hard Silicon for High-Performance Soft Electronics via Geometry Engineering

Lei Yan¹,Zongguang Liu¹,Junzhuan Wang¹,Linwei Yu¹

School of Electronic Science and Engineering/National Laboratory of Solid-State Microstructures, Nanjing University, Nanjing 210023, People’s Republic of China; College of Physics Science and Technology/Microelectronics Industry Research Institute, Yangzhou University, Yangzhou 225009, People’s Republic of China

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Integrating Hard Silicon for High-Performance Soft Electronics via Geometry Engineering
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Published In
Nano-Micro Letters
Published:April 14, 2025Edition:Vol. 17, Issue 1 • pp. 218Citation:Lei Yan et al. (2025), Nano-Micro Letters
Impact FactorPeer-Reviewed Core
Source JournalNano-Micro Letters
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Keywords & Index Terms:Soft electronicsSiliconGeometry engineeringSilicon nanowiresFlexible electronicsWearable electronicsBrain-machine interfaces

Key Takeaways & Executive Findings

  • • Geometry engineering transforms brittle crystalline silicon into flexible forms—from 3D bulk to 2D nanomembranes and 1D nanowires—enabling high-performance soft electronics. • Silicon nanowires, grown via VLS or IPSLS techniques, offer exceptional mechanical flexibility and electrical performance, making them ideal for wearable and implantable devices. • Si-based soft electronics show promise in sensors, nanoprobes, robotics, and brain-machine interfaces, bridging the gap between rigid semiconductors and flexible substrates. • Challenges remain in scalable fabrication, long-term stability, and integration, but future directions point toward fully flexible silicon-based systems for widespread adoption.
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Abstract

Soft electronics, which are designed to function under mechanical deformation (such as bending, stretching, and folding), have become essential in applications like wearable electronics, artificial skin, and brain-machine interfaces. Crystalline silicon is one of the most mature and reliable materials for high-performance electronics; however, its intrinsic brittleness and rigidity pose challenges for integrating it into soft electronics. Recent research has focused on overcoming these limitations by utilizing structural design techniques to impart flexibility and stretchability to Si-based materials, such as transforming them into thin nanomembranes or nanowires. This review summarizes key strategies in geometry engineering for integrating crystalline silicon into soft electronics, from the use of hard silicon islands to creating out-of-plane foldable silicon nanofilms on flexible substrates, and ultimately to shaping silicon nanowires using vapor–liquid–solid or in-plane solid–liquid–solid techniques. We explore the latest developments in Si-based soft electronic devices, with applications in sensors, nanoprobes, robotics, and brain-machine interfaces. Finally, the paper discusses the current challenges in the field and outlines future research directions to enable the widespread adoption of silicon-based flexible electronics.

1. Introduction

Soft electronics, also referred to as flexible electronics, encompass circuits and electronic components capable of maintaining functionality under conditions of bending, rolling, folding, or even stretching. This transformative technology has significantly reshaped the design and functionality of electronic devices [1–4]. Since their inception in the 1960s with the advent of flexible solar cells [5], the field has evolved dramatically, driven by advancements in material science and fabrication techniques. Compared to conventional solid-state electronics, flexible electronics present unique advantages, such as the ability to conform to non-planar surfaces and maintain performance under mechanical deformation [6–10]. These attributes make them indispensable for applications requiring lightweight, portable, and adaptable designs, particularly in areas like medical implants [11–15], wearable technology [16–21], and dynamic operational environment [22–25]. By leveraging these capabilities, flexible electronics enable innovative designs that prioritize user experience and comfort. This adaptability further facilitates the creation of more ergonomic and user-friendly devices, thereby expanding their potential applications.

With the rapid advancement of soft electronics, various flexible materials and structural designs have significantly enhanced the lightweight nature, mechanical flexibility, and portability of electronic devices. Numerous materials, such as organic semiconductors, two-dimensional materials, silicon, and others, have been investigated as substrates or functional components. Organic materials, for instance, offer excellent intrinsic flexibility and stretchability at a low cost; however, they often face limitations in electrical performance and long-term stability [26–30]. Moreover, many flexible electronic systems relying on macromolecular (polymer) chemistry are heavily dependent on fossil-derived resources like oil and natural gas. This dependence not only results in a substantial carbon footprint but also poses significant challenges to the long-term viability of polymer-based technologies as industries strive for low-carbon or zero-carbon frameworks by 2050 [31]. Similarly, while two-dimensional materials such as graphene and MoS2 exhibit excellent electrical and mechanical properties, their high production costs and energy-intensive synthesis methods limit their scalability and environmental compatibility [4, 32–36]. Against this backdrop, silicon-based flexible electronics emerge as a compelling alternative. Silicon (Si) is not only abundant in the Earth’s crust but also offers mature processing technologies and superior electronic properties, making it a promising candidate for next-generation flexible electronics.

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Cite This Research Paper
Lei Yan, Zongguang Liu, Junzhuan Wang, Linwei Yu (2025). Integrating Hard Silicon for High-Performance Soft Electronics via Geometry Engineering. Nano-Micro Letters. https://doi.org/10.1007/s40820-025-01724-1
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Frequently Asked Questions

What is geometry engineering in the context of silicon-based soft electronics?

Geometry engineering refers to the strategic design and fabrication of silicon structures—such as nanomembranes, nanowires, and islands—to impart mechanical flexibility and stretchability to inherently brittle crystalline silicon, enabling its integration into soft electronic devices.

How do silicon nanowires enhance the performance of soft electronics?

Silicon nanowires offer high surface-to-volume ratio, excellent electrical properties, and mechanical flexibility, making them ideal for high-performance sensors, transistors, and interconnects in wearable and implantable devices.

What are the main applications of silicon-based soft electronics?

Key applications include wearable health monitors, artificial skin, robotic sensors, nanoprobes for biomedical sensing, and brain-machine interfaces, where conformability and mechanical robustness are critical.

What are the challenges in integrating silicon into soft electronics?

Challenges include maintaining electrical performance under mechanical strain, achieving scalable and cost-effective fabrication, ensuring long-term stability, and developing reliable integration methods with flexible substrates.

What future directions are proposed for silicon-based flexible electronics?

Future research aims to improve fabrication scalability, enhance mechanical robustness, develop fully flexible silicon-based systems, and explore novel applications in healthcare and human-machine interfaces.

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