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A novel split gate and contact-field-plate LDMOS with enhanced BV−Ron,sp trade-off and improved FOM

Authors: Yiting Ye; Xiaoyun Huang; Yixian Song; Kai Xu

DOI: 10.1088/1674-4926/25080033Status: Verified Translated Edition
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Key Findings in This Report

• A novel LDMOS with split gate and split contact field plate (CFP) is proposed, requiring no extra bias, masks, or process steps, ensuring full BCD compatibility. • TCAD simulations reveal that the split gate reduces specific on-resistance (Ron,sp) by forming an accumulation layer, while the split CFP and gate introduce additional electric-field peaks to maintain high breakdown voltage (BV). • Compared to conventional CFP-LDMOS, the proposed device achieves an 8.52% reduction in Ron,sp without compromising BV, leading to an 8.07% improvement in figure of merit (FOM). • The proposed structure is scalable to various voltage levels in BCD platforms, demonstrating broad applicability in power management and automotive electronics.