• A distributed static model based on the deflection equation improves prediction accuracy of static mechanical quantities in MEMS cantilever beams for microwave power detection chips.
• The pull-in voltage increases with the gap but decreases with the length, with a relative error of only 6.5% compared to simulation, outperforming other models.
• Measured return loss varies between −66.46 and −10.56 dB over 8−12 GHz, showing a V-shaped trend; measured sensitivity of 66.5 fF/W closely matches theoretical 69.3 fF/W (5.6% error).
• The distributed model provides superior accuracy and physical realism, offering important reference for microwave power detection chip design.