• • Hydrophobic nano-silica modified MAPs reduce surface roughness to Sa = 17 nm, a 64.6% improvement over unmodified MAPs (Sa = 48 nm), directly enabling optical-grade glass-ceramic components with minimized light scattering and enhanced mechanical reliability.
• • Dynamic friction coefficient drops to μ = 0.31 for hydrophobic MAPs versus 0.42 for unmodified MAPs, a 26.2% reduction that lowers thermal load and tool wear, extending abrasive lifespan and reducing polishing cycle costs in precision manufacturing.
• • Material removal depth reaches 2.5 μm with hydrophobic MAPs, surpassing hydrophilic and unmodified variants, which translates to higher throughput without compromising surface integrity—critical for scaling to industrial batch production.
• • Subsurface damage analysis via HF etching confirms hydrophobic MAPs suppress micro-crack and pit formation, reducing subsurface damage layer thickness, which is essential for high-reliability applications such as semiconductor substrates and biomedical implants.