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Protected by Google reCAPTCHA v3.•Privacy•Terms Key Findings in This Report
• AlScN exhibits exceptional piezoelectricity with d33 increasing from 5 to 30 pC/N and electromechanical coupling coefficient (Kt2) rising from 7% to 25% at 40% Sc doping.
• AlScN demonstrates ferroelectricity with remnant polarization exceeding 100 μC/cm2, surpassing conventional AlN limitations.
• Micro/nano fabrication advances enable low-stress (<200 MPa) high-quality AlScN films and high-aspect-ratio structures for high-frequency devices beyond 10 GHz.
• AlScN's multifunctional properties (piezoelectric, pyroelectric, ferroelectric) enable diverse applications in MEMS, RF communications, energy conversion, optoelectronics, and sensors.